Orient Semiconductor Technology Equipment Co., LTD.

Orient Semiconductor Technology Equipment Co., LTD.was founded in 2021. The manufacture fab is in Suzhou Wujiang District, where is the Hi-Tech equipment zone named of Fenhu Innovation Park. We also have offices in Shanghai and South Korea. We are determined to become a leading semiconductor manufacture equipment company to serve customers all over the world.

As a semiconductor equipment provider, Orient Semiconductor Technology Equipment Co., LTD. focuses on the R&D, production and sales of CVD/ALD equipment carrying independent intellectual property. Currently, Orient Semiconductor Technology Equipment Co., LTD. is one of few equipment manufacture companies who can provide CVD/ALD system products in China.
  • Serve global customers

  • Advanced technology

  • Excellent R&D team

Company Environment
Corporate Culture
Product Center

Thermal ALD-SiN

Model:DL6XX-ASE100
DL6XX-ASE100 series is a 12-inch Furnace device which forms SiN film by ALD (atomic deposition) in semiconductor manufacturing process. In the SiN deposition process, the device can precisely control the film formation thickness and uniformity, and has excellent step-coverage, compactness and low heat.

The equipment is designed to improve the cleaning process of residual particles, facilitate maintenance, and increase customer convenience. In addition, by improving the communication mode between equipment parts, the operation control system is simplified, and the product installation and life cycle are greatly improved.

Application: Integrated circuit manufacturing and advanced packaging
Applications